We experimentally investigated indoor air ventilation using the CO 2 tracer technique to
verify the infection cluster of SARS-CoV-2 that erupted at an office space. Multi-placed …

This study reports the time-dependent-dielectric-breakdown (TDDB) reliability of NiAl on
SiO 2 without any barrier layer. NiAl was indicated to exhibit superior TDDB reliability in …

We have investigated electromigration (EM) lifetimes and void formation at cumulative failure
probability of around 50 ppm. We carried out EM test in damascene Cu lines using sudden-…

This paper discusses the statistical modeling of the V th distribution of an ovonic threshold
switch, an integral component of high-speed, high-capacity storage-class memory. A …

Increasing the proportion of renewable energy- particularly solar energy-in global energy
consumption will increase the electricity generated and consumed in the vicinity of consumers …

This paper presents scaling impacts on electromigration‐induced mass transport in narrow
single damascene Cu interconnects. The Kawasaki‐Hu test structure was used to investigate …

We report the effects of Al doping on electromigration in damascene Cu interconnects. Al
doping was performed by thermal diffusion from a CuAl seed layer positioned underneath the …

A coronavirus disease 2019 (COVID-19) cluster emerged in a manufacturing factory in early
August 2021. In November 2021, we conducted a ventilation survey using the tracer gas …

In this paper, we investigated the effect of impurity (aluminum; Al) doping on the resistivity of
damascene copper (Cu) interconnects by categorizing it into surface, grain-boundary, and …

In this paper, we present the results of voltage-ramp dielectric breakdown and time-dependent
dielectric breakdown experiments for contact-polysilicon control gate intra-level dielectric …